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AlN:Er薄膜在不同退火温度下应力诱导的微观结构演变
外文标题:Stress Induced Microstructure Evolution of AlN: Er Film at Different Annealing Temperature
文献类型:期刊论文
作者:Yang Ming-Ming[1]  Mo Ya-Juan[2]  Wang Xiao-Dan[3]  Zeng Xiong-Hui[4]  Liu Xue-Hua[5]  Huang Jun[6]  Zhang Ji-Cai[7]  Wang Jian-Feng[8]  Xu Ke[9]  
机构:[1]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China.;Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China.;
[2]Univ Sci & Technol Suzhou, Suzhou 215009, Peoples R China.;
[3]Univ Sci & Technol Suzhou, Suzhou 215009, Peoples R China.;
[4]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China.;
[5]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China.;
[6]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China.;
[7]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China.;
[8]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China.;
[9]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China.;
通讯作者:Yang, MM; Zeng, XH (reprint author), Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China.
年:2016
期刊名称:无机材料学报影响因子和分区
卷:31
期:03
页码范围:285-290
增刊:正刊
收录情况:SCI(E)(WOS:000370927000010)  中文核心期刊要目总览  中国科技核心期刊  
所属部门:材料科学与工程学院
语言:中文
ISSN:1000-324X
被引频次:1
人气指数:7
浏览次数:7
基金:National Natural Science Foundation of China [61306004, 51002179, 11247023, 51272270, 61274127, 61474133]; Natural Science Fund of Jiangsu Province [BK20130263, BK2012630]; National Basic Research Program of China (973 Program) [2012CB619305]; CAS Project of Introduction of Outstanding Technical Talent; Collaborative Innovation Center of Suzhou Nano Science and Technology
关键词:AlN:Er;离子注入;微观结构演变
摘要:以透射电镜中的弱束衍衬成像和高分辨相位衬度成像为主要表征手段,辅以X射线衍射、拉曼光谱等测试方法,对Al N:Er样品在退火过程中的微观结构演变过程进行了深入分析。在透射电镜观察下,Er离子注入的Al N样品在退火前存在三个区域:区域Ⅰ为自表面以下约30 nm深度;区域Ⅱ为区域I以下约50 nm深度;区域Ⅲ为区域Ⅱ以下的部分,其中区域Ⅱ为损伤最为严重的区域。在较低的温度(如1025℃时)退火后,区域Ⅰ消失;但1200℃退火后,又重新可以观察到区域Ⅰ。结合TEM、XRD和Raman测试结果,从损伤恢复和应力释放的角度对上述实验现象进行了理论解释:由于Er离子半径和基体原子半径的差异,在区域Ⅱ中引...
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